Product Details


High Purity Regulators

Advanced Pressure Technology (APTech)

AP10PA PNEUMATICALLY ACTUATED PRESSURE REGULATOR

  • Actuation control pressure isolated from process gas by two seals
  • Single stage
  • SS 316L VAR secondary remelt or super alloy construction
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Surface finish 15 Ra max/10 Ra avg (10, 7 & 5 Ra max options)
  • Vacuum to 3,500 psig (241 bar) inlet
  • 100 psig outlet achieved with 80 psig control pressure or less
  • Actuator ‘fail safe’ normally closed (NC)





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