Product Details


High Purity Regulators

Advanced Pressure Technology (APTech)

AP1100 ABSOLUTE REGULATOR

  • Single stage
  • SS 316L VAR secondary remelt or super alloy construction
  • Surface finish 15 Ra max/10 Ra avg (10, 7 & 5 Ra max options)
  • Only one nonmetallic seal (PCTFE) in the process stream
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Flow rate to 500 sccm
  • Vacuum to 300 psig (21 bar) inlet, 100 torr to 10 psig (.7 bar) outlet





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