Product Details


High Purity Regulators

Advanced Pressure Technology (APTech)

AP2700 TWO STAGE REGULATOR

  • Regulator of choice for NF3 and H2 BSGS delivery of intermediate flows
  • Flow rates to 150 slpm of NF3 and 900 slpm of H2 (based upon minimum inlet pressure of 200 psig (14 bar)
  • Two stage pressure reduction eliminates supply pressure effect
  • Surface finish 15 Ra max/10 Ra avg (10, 7 & 5 Ra max options)
  • Vacuum to 3,500 psig (241 bar) inlet





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