Product Details


High Purity Regulators

Advanced Pressure Technology (APTech)

AZ1000 SERIES SINGLE STAGE REGULATOR

  • SS 316L construction
  • 10 µin. surface finish (25 µin. optional)
  • Vacuum to 3500 psig (241 bar) inlet
  • 1 to 150 psig (0.07 to 10 bar) outlet
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Flow rates
  • Standard to 30 slpm
  • HF option to 120 slpm
  • Regulator of choice for point of use applications





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