Product Details


High Purity Regulators

Advanced Pressure Technology (APTech)

AZ1100 SINGLE STAGE REGULATOR

  • Single stage
  • SS 316L construction
  • 10 µin. surface finish (25 µin. optional)
  • Only one nonmetallic seal (PCTFE) in the process stream
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Flow rate to 500 sccm
  • Vacuum to 300 psig (21 bar) inlet, 100 torr to 10 psig (.7 bar) outlet





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