McMillan, a leader in flow measurement and control for high purity liquids, released three exciting products at the recent SEMICON West 2008 show at the MosconeCenter in San Francisco.  Two new flow controllers and one new flow monitor were on display at the show, in addition to the existing line of McMillan UHP products. 

The McMillan Model U709 PhotoResist FLO-MONITOR was one of the new products released at the show. This product enables OEMs and end users to accurately monitor the dispense of many types of photoresist, a very expensive chemical used in semiconductor manufacturing. Before the U709, many processes did not have confirmation of photoresist dispense, leading to large losses if wafers were improperly processed. The U709 uses McMillan’s patented zero-particle-generation measurement technology to verify dispenses, even the very fast dispenses common for this application. For most applications, the U709 can measure dispenses even as short as 500 msec. It can also accurately report dispenses of photoresist up to 80 cP in viscosity. 

Also released were two new flow controllers, the U803 and U804 Compact Liquid FLO-CONTROLLERS. Both are nearly 50% smaller than the existing U802, and are available for approximately 30% less cost than the larger, higher performance U802. The U803 provides inlet and outlet connections on the same side to reduce footprint, whereas the U804 is an inline configuration and can replace many existing flow controllers and other components with minimal tubing changes. Both will control as low as 7 mL/minute and as high as 1 L/minute. 

Sales literature and product specifications will be released in September 2008 for all three new products.