Applications

• Plasma Deposition/Etch
• Sputtering/PVD/RTP 
• Industrial CVD/Ion Implantation
• LPCVD
• Crystal Growing/Freeze Dryers

Heated 700 Series Specifications
Model 764	Temperature controlled to 45°C
Type of Pressure	Absolute
Electrical Output (Voltage)	0 to 10 VDC
Resolution	0.005% of FS
Accuracy	±0.15% of Reading + 005% of FS
Excitation	±15 VDC ±5% Regulated to 1%
PressureRanges	50 mTorr: Model 764 only 100 mTorr: Model 764 and 769 only 0 to 1, 2, 10, 100, 1000 Torr 1, 10, 100, 1000 Millibar/hPa
Thermal Effects	Compensated Range °C: +15 to +40  Zero Shift: >1 Torr = 0.002% FS/°C                   <=  1 Torr = 0.005% FS/°C Span Shift: ±0.02% Rdg/°C
Media	Gases compatible with Inconel®