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McMillan Model U709 UHP Liquid FLO-MONITORS will precisely measure flow rates of
virtually any photoresist chemical, whether a short burst of flow or a
continuous flow. Dispenses as short as 500 milliseconds and volumes as low as
0.1 grams can be detected repeatably.
Repeatable results are achieved by
using a patented microturbine flow sensor design. This design, unlike
traditional paddlewheel designs, provides accurate flow measurement with no
particle generation or elemental contamination. PTFE, perfluoroelastomers, and
sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP
slurries, acids, solvents, and photoresist.
These FLO-MONITORS integrate
the sensing element with advanced electronics to provide output signals
proportional to flow rate. Each unit is individually calibrated before shipment,
and a certificate of calibration accompanies all FLO-MONITORS. The reliable
technology used reassures process engineers of consistent repeatable results.
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Boiswood are excited to introduce a new family of
HVAC/R products for both humidity and current sensing. With the new Humidity
line and suite of current switches, customers can order all of their sensors
from a single source with trusted quality, delivery and performance. This includes products from single range and
multi range pressure transducers to low current sensors with snap on relays and
humidity transducers that meet their published specifications.
