UHP Diaphragm Valves (or ultra-high purity diaphragm valves) are critical components utilised in many clean applications by industries including semiconductor, food & beverage, pharmaceutical & medical and high-tech research & development.

Our selection of UHP diaphragm valves from Rotarex are all assembled, tested and packaged in Class ISO 4 cleanrooms as well as individually serialised for full traceability, giving you the confidence and control you need over your high purity systems. We can offer both manual and pneumatic diaphragm valves, for high and low flow applications with options of electropolishing, springless design, replaceable seat design, tied diaphragms, electric limit switches and more.

Ultra High Purity Diaphragm Valves

 

Ultra High Purity Diaphragm Valves Overview

Our range of UHP diaphragm valves can be summarised based on your technical process specifications, including:

  • Max. Working Pressures of up to 240 BARG (3,481 PSIG).
     
  • Actuation Types including manual (via quarter-turn or multi-turn handwheel) and pneumatic.
     
  • Flow Capacities ranging from 0.20 to 3.50 Cv sizes.
     
  • Surface Finishes including 0.4 µm Ra (15 µin), 0.25 µm Ra EP (10 µin) and 0.13 µm (5 µin) with Electropolished options as per SEMI F19 standards.
     
  • Body Materials including 316L Stainless Steel and VAR (Double Melt per SEMI F20), as well as exotic alloys such as Monel and Hastelloy on request.
     
  • Seat Materials including PCTFE (Kel-F®) as standard, plus other options such as PI (Vespel®), PVDF and Metal.
     
  • Temperature Ranges from -20°C up to +150°C (-4°F to +302°F) depending on seat material selection.
     
  • Multiple Port Configuration options from 2 ports to 4 ports (over 10 designs available).
     
  • Fluid media ranging from standard to high or ultra high purity corrosive and non-corrosive gases.

 

With the basic process considerations out of the way, we can also offer our range against more specific technical requirements, including:

  • Reverse seat design for ultra-high life cycle or Replaceable seat design for ease of maintenance.
     
  • Leakage Rates of ≤ 1 x 10-9 mBAR l/sec through certified Helium leak testing at inboard, outboard and across the seat.  
     
  • Internally springless design for a ‘True UHP’ wetted flow path or Tied Diaphragm design for consistent internal movement.
     
  • Constant Bleed options for particularly aggressive media.
     
  • Additional extra options including LOTO (Lock Out Tag Out), Purge Ports, Panel Mount and Electric Limit Switches.
     
  • Connection sizes ranging from 1/4” to 1/2” in both FaceSeal (VCR) and Butt Weld Ends (BWO) design.   
     
  • Seat diameters ranging from 4mm (0.16”) up to 20mm (0.79”).
     
  • Low wetted internal volumes ranging from < 1.2 cm³ up to < 7 cm³.
     
  • Manual 270° Multi-turn Handwheel with visual open/close indicator and a range of optional colours including blue (standard), red, black, yellow and green.  
     
  • Full Traceability via Individual Serial Number on items.

 

LOTO Diaphragm ValvesLock Out Tag Out Diaphragm Valves

Our flagship models M4SI and M8SI diaphragm valves are now available with the lock-out-tag-out (LOTO) feature as an additional option. The LOTO locking feature prevents accidental actuation of the UHP valves offering end users superior operational safety. Additional features & benefits of using LOTO include:

  • Provides users with enhanced operation safety as the valve cannot be opened inadvertently.
  • The valve footprint remains unchanged with the LOTO addition equipped.
  • Easy-to-read visual indication to show if the valve is in the Open or Closed position.
  • Physical lock insertion is possible in either the Open or Closed position.
  • Different handwheel colours available to meet customer requirements.
  • No loose parts or tools required as the locking mechanism is fully integrated into the valve.
  • Suitable for a wide range of fields including semiconductor, FPD (flat panel displays), PV (photovoltaic), medical, chemical and more.

 

Custom Diaphragm Valves for Optimised UHP SystemsCustomised Diaphragm Valves

Again, our most popular models M4SI and M8SI diaphragm valves are available as part of the “EVO” solutions, which are adaptations to the standard valve offering with improved design and performance features. These UHP line valves have been optimised through various design upgrades and boast the following features & benefits:

  • A shorter stem that reduces the overall height of the valve.
  • A compact and ergonomic handwheel for better handling and adjustment (manual version).
  • A lightweight design with a net weight of 296 grams that allows more flexibility on installation.
  • A reduced internal dead space for easier purging.
  • An encapsulated PTFE seat significantly reduces micro-particle contamination of the gas stream.
  • Designed with high quality raw materials to withstand over 1 million cycles.
  • All internal surfaces are electropolished for a smoother gas flow and higher corrosion resistance.

These diaphragm valves are available in manual, pneumatic and “V” block type versions. Selection of these units will depend on CV requirements, end connections and operating temperature/media.

 

Tied Diaphragm Line Valves for UHP ApplicationsUHP Tied Diaphragm Line Valves

We are also able to help with specialist tied diaphragm line valves, in either manual or pneumatic actuation configurations. These high flow line valves are tied diaphragm double seal type specifically designed for use on ultra-high purity corrosive gases. These UHP line valves offer many features & benefits to end users including:

  • A threaded weep hole for a “pipe away” connection.
  • The tied diaphragm design with minimal gas wetted volume.
  • A combined soft and metal seat design with a low permeation rate.
  • Available in special alloys for particularly aggressive or corrosive media.
  • Electropolishing of all internal surfaces to offer outstanding corrosion resistance.
  • Wide range of connections available according to various international standards.

These UHP line valves are designed to work up to 200 BAR (3,000 PSI) pressure, temperatures from -40°C to +65°C and as standard are offered in AISI 316L Stainless Steel construction materials.

 

On/Off Diaphragm Valve Applications

Our UHP diaphragm valves can be considering for many ultra-clean and demanding applications across a broad selection of industries, including:

  • Laboratory & Research – diaphragm valves designed for specialty gases for use in calibration, research and test & measurement applications. Specialty gases can include Argon, Helium, Carbon Dioxide, Oxygen, Nitrogen, Hydrogen or various mixes.
     
  • Microelectronic & Semiconductor – compact, high performance & low cost valves designed for electronic components, integrated-circuits, chipsets and sensor production applications. These are required to uphold the highest level of tightness, safety and purity standards.
     
  • Food & Beverage – fully compliant diaphragm valves designed for freezing & chilling, carbonation of beverages, modified atmosphere packing, temperature control, fresh product preservation and transportation applications.   
     
  • Pharmaceutical & Medical – diaphragm valves adhering to the highest cleanliness standards designed for use in both hospital/medical environments and process manufacturing facilities. These are often required with easy gas identification and traceability standards.

 

An Entire Line of Speciality & UHP Gas Equipment

We can help with all your gas equipment needs, from source to process. All our components are suitable for use on industrial, food-grade, speciality and ultra-high purity gas types.

Within our range we can offer pressure regulators, supply & switchover boards, diaphragm & line valves, flexible hose assemblies, pipeline equipment, fittings, cylinder connectors and flame arrestors.

Working in partnership Rotarex, with 4 research & development centres, in-house testing laboratories, many university collaborations and simulation departments, we have got you covered.

 

Your Shop for UHP Diaphragm Valves

Whatever you require for your UHP application, we can help you to find suitable components. To explore our full range of UHP diaphragm valves, please visit our subcategory page here.

For help on selecting any UHP pressure regulators and other supporting information on corrosion resistance and specifications required, you can visit our specific UHP pressure regulator blog by clicking here.  

For technical support on selecting the right UHP valve for your application, get in touch with our experienced team here.