PFA Pumps

Ultra High Purity Furon Pumps for Semiconductor Industries

Our range of dependable, fluoropolymer-based pumps with PFA or PTFE wetted flow paths, designed specifically for delivery of high purity and/or aggressive media. We can offer:

• Distribution Pumps are designed specifically to transport a wide array of bulk liquids used in the semiconductor industries, from highly pure and corrosive chemicals to very abrasive slurries. Our time-tested pneumatically operated Furon A2 pumps feature 100% metal free and o-ring free construction, eliminating any possibility of ionic contamination caused by exposure of corrosive chemicals to such components, offering end users preventative maintenance and unrivalled uptime performance.
• Dosing Pumps are designed for a wide variety of demanding semiconductor applications, including etching, photoresist, dosing and dispending where critical accuracy and repeatability are required. Models such as the Furon PDP, MDP and PPRD range provide solutions for dosing a fraction of a microlitre up to 80 milliliters per stroke with an emphasis of reproducibility. All our dosing pumps are 100% metal and elastomer-free.

Dosing Pumps

Bellows Pumps

Dispensing Pumps

UHP Pumps Designed for Every Application

• The latest generation of Furon A2 pumps feature 100% metal free and o-ring free construction, eliminating any possibility of ionic contamination caused by exposure of corrosive chemicals to such components.
• Furon High Temperature pumps are manufactured from advanced engineering thermoplastics, including fibre reinforcement to enable premium performance even at highly elevated temperature levels.
• Furon High Flow pumps are self-priming, providing an easy installation and set up for a high purity 100% metal-free design and provides an adjustable high flow rate.
• Furon PV series pumps offer a more cost-effective solution for handling corrosive or aggressive media in your drain, sump or industrial applications.
• Furon A2 Dampeners are suitable for dampening aggressive chemicals or slurries, reducing pump pulsation up to 85% of their nominal value and directly adapt to the pump stroke and line pressure.
• Furon Turbo pumps are magnetically driven turbine pumps engineered to boost fluid pressure in deionized (DI) water applications, and with other low viscosity fluids.
• Furon MDP and Furon PPRD pumps provide a solution for dosing a fraction of a microliter up to 80 milliliters per stroke with an emphasis of reproducibility. They also feature an embedded microprocessor-based controller for unmatched driving and control capabilities from your tool.

How Do Our Semiconductor Pumps Work?

For an overview on how our A2 distribution pump technology works, please watch our introductory overview video below:

Still not sure what you need? Click here to download our latest Microelectronics product brochure to get an overview of all our high-purity handling solutions for demanding semiconductor requirements, including chemical delivery, wafer processing, slurries, precision dispensing and high temperatures.