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    ROTAREX M4SI HIGH PURITY DIAPHRAGM VALVE

    ROTAREX M4SI HIGH PURITY DIAPHRAGM VALVE

    Manufacturer

    Rotarex

    Download the Datasheet

    Key Features:

    • 100% Helium Leak Test performed
    • Assembling, testing & Packaging in cleanroom: Class ISO 4
    • Reverse seat design for high life cycle
    • Individual serial number for full traceability
    • Electropolished surface roughness per SEMI F19 UHP Grade
    • Fluid specific seat material as standard options
    • Low internal volume
    • Constant bleed option available
    • 316L VAR® stainless steel double melt per SEMI F20 option available
    • Additional Multi-port options
    • 270° multiturn handwheel with open/close indicator

    For more information, including dimensional drawings, technical specifications and how to order – please download our datasheet.

    Download the Datasheet Quick Quote Optional Configurations

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