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    ROTAREX RX1000 HIGH PURITY PRESSURE REGULATOR

    ROTAREX RX1000 HIGH PURITY PRESSURE REGULATOR

    Manufacturer

    Rotarex

    Download the Datasheet

    The RX1000 Diaphragm Pressure Regulator was formely Model SIR100 and SIR200.

    Key Features:

    • 100% Functional & Helium Leak Test performed
    • High-Flow (HF) version (Cv:0.2) available
    • Hastelloy® diaphragm
    • Assembling, testing & packaging in cleanroom: Class ISO 4
    • Individual serial number for full traceability
    • Electropolished surface roughness per SEMI F19 UHP Grade
    • Low internal volume
    • 316L VAR® stainless steel double melt per SEMI F20 option available
    • Excellent performance at low source pressure
    • Fluid specific seat material as standard options
    • Additional multi-port options

    For more information, including dimensional drawings, technical specifications and how to order – please download our datasheet.

    Download the Datasheet Quick Quote Optional Configurations

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