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SPR SUBATMOSPHERIC PRESSURE REGULATOR

The SPR Series Subatmospheric Pressure Regulator is designed for the introduction of a low vapor pressure reactive or purge gas into a subatmospheric process The large diameter diaphragm provides optimum sensitivity for subatmospheric or positive pressure control.

Standard features allow service in many varied applications including corrosive fl uids and, with the optional features available, the user can tailor this regulator to applications ranging from semiconductor processing to analytical instrumentation.

Features and Specifications:

  • Subatmospheric or positive pressure control
  • 20 micron inlet fi lter
  • 316L stainless steel or brass construction
  • Large stainless steel diaphragm with PTFE lining for optimal pressure control
  • Inlet pressure range from 15–160 psia (0–145 psig)
  • Adjustable outlet pressure range of 1–30 psia (27.88 in. H2O = 15.3 psig)
  • Cv flow coefficient of 0.2
  • Bubble-tight shutoff
  • Operating temperatures -40degF to +250degF (-40degC to +121degC)
  • Inlet/outlet connections ¼? FNPT

Options:

  • High purity welded connections
  • Class 100 assembly
  • Extra ports
  • Panel mount (requires 13/8? mounting hole)
  • Pressure gauges






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