MEMS-Based Mass Flow Controllers for Gas Applications
McMillan RHODIUM Series Flow Controllers are capable of measuring and controlling virtually any clean, dry gas as low as 0-50 sccm or as high as 0-20 Lpm. Repeatable results are achieved using a platinum-based microelectromechanical system (MEMS) flow rate sensor device that is manufactured with extreme precision to ensure consistent results from unit to unit.
To actively control flow rate, RHODIUM units leverage a high precision PID controller to control a fast-acting solenoid valve. Analog inputs enable direct, fast, and accurate control of the gas flow. Integrated analog outputs report current flow rate for monitoring and control verification.
Compared to conventional mass flow controllers, RHODIUM Series Flow Controllers offer smaller size, higher accuracy, larger turn-down ratios, and faster response times.
Key Features & Benefits:
Thermal mass flow controllers feature fast response, virtually zero maintenance, and precise measurement. These are all very important qualities among today’s variety of applications. The McMillan RHODIUM Series Mass Flow Controllers utilise MEMS thermal sensing technology.
MEMS technology utilizes a compact, reliable CMOS (Complementary Metal Oxide Semiconductor) sensor. This no-drift sensor module is comprised of both the electronic and mechanical elements on a single silicon chip, similar to the process used for integrated circuits.
For more detailed information and specifications, please click below to download our product datasheet.