McMillan Model U803 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results.