The RX1000 Diaphragm Pressure Regulator was formely Model SIR100 and SIR200.
- 100% Functional & Helium Leak Test performed
- High-Flow (HF) version (Cv:0.2) available
- Hastelloy® diaphragm
- Assembling, testing & packaging in cleanroom: Class ISO 4
- Individual serial number for full traceability
- Electropolished surface roughness per SEMI F19 UHP Grade
- Low internal volume
- 316L VAR® stainless steel double melt per SEMI F20 option available
- Excellent performance at low source pressure
- Fluid specific seat material as standard options
- Additional multi-port options
For more information, including dimensional drawings, technical specifications and how to order -
please download our datasheet.