RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR
RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

Category

High Purity Regulators

Manufacturer

Rotarex

Info Quote
RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

Category

High Purity Regulators

Manufacturer

Rotarex

The RX1000 Diaphragm Pressure Regulator was formely Model SIR100 and SIR200.



Key Features:

  • 100% Functional & Helium Leak Test performed
  • High-Flow (HF) version (Cv:0.2) available
  • Hastelloy® diaphragm
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Low internal volume
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Excellent performance at low source pressure
  • Fluid specific seat material as standard options
  • Additional multi-port options


For more information, including dimensional drawings, technical specifications and how to order - please download our datasheet.



PDF - DATASHEET
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Why choose Boiswood
for your RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

Fast Turnaround Read more
Our local stocks allow us to quickly respond to requirements for our products. We hold a vast range of products and spare components in stock so that they're always readily available.
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Boiswood offer a technical helpline from our HQ as well as having a “man on the ground” for on-site support whenever and wherever this is required. We can help size and specify our products for even the most bespoke applications.
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In-House Repair Centre Read more
We can offer manufacturer certified in-house evaluation, repair, testing, servicing and assembly of our products from within our Boiswood HQ.
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We offer a range of educational classes and training seminars that can be delivered from Boiswood HQ or on-site. We can deliver a bespoke seminar tailored for your needs.
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