RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR
RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

Category

UHP Pressure Regulators

Manufacturer

Rotarex

Info Quote
RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

Category

UHP Pressure Regulators

Manufacturer

Rotarex

The RX1000 Diaphragm Pressure Regulator was formely Model SIR100 and SIR200.



Key Features:

  • 100% Functional & Helium Leak Test performed
  • High-Flow (HF) version (Cv:0.2) available
  • Hastelloy® diaphragm
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Low internal volume
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Excellent performance at low source pressure
  • Fluid specific seat material as standard options
  • Additional multi-port options


For more information, including dimensional drawings, technical specifications and how to order - please download our datasheet.



PDF - DATASHEET
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for your RX1000 HIGH PURITY DIAPHRAGM PRESSURE REGULATOR

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