The RX2200 Diaphragm Pressure Regulator was formely Model SI220.
- 100% Functional & Helium Leak Test performed
- Hastelloy® diaphragm
- Internally spring- and threadless for highest UHP requirements
- Assembling, testing & Packaging in cleanroom: Class ISO 4
- Individual serial number for full traceability
- Corrosion resistant internal option available: Hastelloy® poppet
- Electropolished surface roughness per SEMI F19 UHP Grade
- Coating option of wetted areas is available
- 316L VAR® stainless steel double melt per SEMI F20 option available
- Fluid specific seat material as standard options
- Additional multi-port options
For more information, including dimensional drawings, technical specifications and how to order -
please download our datasheet.