The RX2500 Diaphragm Pressure Regulator was formely Model SI25.
- 100% Functional & Helium Leak Test performed
- Hastelloy® diaphragm
- Internally springless
- Assembling, testing & Packaging in cleanroom: Class ISO 4
- Individual serial number for full traceability
- Corrosion resistant internal option available: Hastelloy® poppet
- Electropolished surface roughness per SEMI F19 UHP Grade
- 316L VAR® stainless steel double melt per SEMI F20 option available
- High-Flow (HF) version (Cv:1.2) up to 1150 SLPM availble
- Fluid specific seat material as standard options
- Additional multi-port options
For more information, including dimensional drawings, technical specifications and how to order -
please download our datasheet.